Characterization of {111} planar defects induced in silicon by hydrogen plasma treatments
نویسندگان
چکیده
منابع مشابه
Theoretical models of hydrogen-induced defects in amorphous silicon dioxide
Al-Moatasem El-Sayed,1,* Yannick Wimmer,2,† Wolfgang Goes,2,‡ Tibor Grasser,2,§ Valery V. Afanas’ev,3,‖ and Alexander L. Shluger1,¶ 1Department of Physics and Astronomy and London Centre for Nanotechnology, University College London, Gower Street, London, WC1E 6BT, United Kingdom 2Institute for Microelectronics, Technische Universität Wien, A-1040 Vienna, Austria 3Department of Physics, Univers...
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ژورنال
عنوان ژورنال: Philosophical Magazine
سال: 2006
ISSN: 1478-6435,1478-6443
DOI: 10.1080/14786430600801443